Sapphire’s high purity and strength is an excellent and industry accepted material for Semiconductor manufacturing. Its durability and scratch resistance make Sapphire ideal for vacuum environments and high plasma resistance to withstand etching.
Sapphire Window and Viewports – good transmission in Visible & IR Wavelength and excellent life span. UV Grade available.
Sapphire Lift Pins – replacing Quartz with less wear, excellent heat and plasma resistance.
Sapphire Balls – precision roundness and excellent wear for plates/wafer support